Problem
The rotating shaft of a semiconductor deposition tool uses a seal to keep the process chamber closed. Knowing in advance when a seal will wear out lets you plan the replacement before the tool stops. The problem is to predict the remaining useful life (RUL) of the seal from operating conditions.
Seals are rubber based with many formulation ingredients, and data builds up separately for each material type, so the data tends to be many small datasets. Operating conditions add another layer: the same material degrades at different rates depending on where it is used.
TendiLab Solution
We take the seal material information and operating conditions together as inputs and predict how performance changes over time and how long the seal lasts. We analyze which conditions speed up degradation so the results can guide replacement timing.
Target KPIs
- Predict the remaining useful life of seals for given operating conditions.
- Find the operating conditions that speed up degradation and use them to time replacements.
Next Steps
The project was selected and, after working-level discussions, the PoC is now under way. We will share results after the project ends.